Triethylaluminum (eTMA)
Al(CH3)3
Trimethylaluminum, electronic grade, often abbreviated as E-TMA, with the chemical formula, Al (CH3)3, is a preferred metal organic precursor source for the atomic layer deposition (ALD) or chemical vapor deposition (CVD) of aluminumcontaining compound in semiconductors. Applications of E-TMA include high-K dielectric material for semiconductor chips, high efficiency photovoltaic cells, light emitting diodes (LED), and other electronic applications.
E-TMA is provided as a “neat” or undiluted liquid. E-TMA is a clear, colorless, pyrophoric liquid which catches fire when exposed to air. E-TMA is known to react violently with water, acids, other protic compounds, oxidizing agents, certain metals, and halogenated compounds.
E-TMA should be stored away from flammable materials in a cool, dry location under an inert atmosphere (e.g., dry nitrogen) where the storage temperature does not exceed 40°C.
Handling Instructions
E-TMA presents potential hazards not common to most liquid chemicals. The pyrophoric nature of E-TMA means it reacts spontaneously if exposed to air, releasing smoke, heat, and flammable vapors. E-TMA is a clear, noncorrosive, mobile liquid with a low vapor pressure. The material of construction for all pipes, vessels, and protective equipment contacting E-TMA should be stainless steel. Never use plastics. Fumes may cause skin and eye irritation. Avoid inhalation of fumes. If inhalation occurs, medical assistance should be immediately sought. Water, foam, or halogenated compounds are not recommended as a fire-fighting media. Instead, use dry powder, soda ash, or lime. As is the case with any exposure, prompt medical attention is required. Rescue personnel should be equipped with the appropriate and proper protective equipment to ensure they are not exposed. For toxicity information, please refer to the Safety Data Sheet. For more detailed information and procedures for handling metal organics, please refer to Albemarle's Handling Procedures for Organometallics manual, which is available upon request. Albemarle's commitment to product stewardship involves direct customer engagement whereby highly trained and certified technical personnel perform on-site safety audits, handling demonstrations, and are available for classroom technical discussions.
Legal Disclaimer
The information presented herein is believed to be accurate and reliable but is presented without guarantee or responsibility on the part of Albemarle Corporation and its subsidiaries and affiliates. It is the responsibility of the user to comply with all applicable laws and regulations and to provide for a safe workplace. The user should consider any health or safety hazards or information contained herein only as a guide and should take those precautions which are necessary or prudent to instruct employees and to develop work practice procedures in order to promote a safe work environment. Further, nothing contained herein shall be taken as an inducement or recommendation to manufacture or use any of the herein materials or processes in violation of existing or future patent.